1. What is sputtering deposition?

Sputter deposition is a method of depositing thin films by sputtering material from a “target”. Sputtering is a term used to describe the mechanism in which atoms are ejected from the surface of a material when that surface is stuck by sufficiency energetic ions generated by low-pressure gas plasma, usually an argon plasma. The sputtering takes place at a much lower temperature than evaporation. Sputtered atoms ejected into the gas phase in vapor form are not in their thermodynamic equilibrium state and tend to condense on all surfaces in the vacuum chamber including the substrate.

2. Why are thin films important?

There are many useful applications for thin films. We desire to produce properties in a material that are often conflicting in nature if we use one homogeneous material. Semiconductor devices, for example, are fabricated on a thin layer deposited on a semiconductor substrate. The integrated electronic circuits depend on the confinement of electrical charges, which relies on the interfaces between different materials with different electronic properties. There are also many occasions when the properties demanded an engineering application involve features that are different for the surface than that are for the bulk. Depositing metal films and patterning them on the surface are relatively easy to secure electrical connection between semiconductor devices.

3.How does a sputtering system work?

Generally, in sputtering systems ions are generated and directed at a target, then ions sputter targets atoms. The ejected atoms are transported to the substrate and atoms condense and form a thin film. Below image shows the simple schematic of a sputtering system.

Sputtering and Thermal Evaporation Coater - NanoStructured Coatings Co.

VCS100F is a Vacuum Sputtering and Thermal Coating System and the system has the following technical detail:

Two cathode magnetron with 3 degrees of freedom adjustment
DC power supply with automatic matching box
Thermal evaporation platform with 300 A current
Boat holder and current display
Double layers water-cooled vacuum chamber
Turbomolecular pump for high vacuum
Backup the rotary pump
Smart valve for turbopump with a touchscreen monitor
Electro-pneumatic valves
Crystal thickness monitor with 1nm resolution and 4 sensor holder
Substrate holder with electronic shutter and electronic feedthrough four magnetron
Two-stage backup rotary pump
Smart valve for turbopump.Touch screen interface
Quartz crystal thickness monitor with 1 nm resolution and 4 sensor holder
Customizable

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