VACUUM SPUTTERING AND THERMAL COATING SYSTEM
Our system is the most improved system in the world and has the following technical detail.
VCS100F is a Vacuum Sputtering and Thermal Coating System.
- Two cathode magnetron with 3 degrees of freedom adjustment.
- DC power supply with automatic matching box.
- Thermal evaporation platform with 300 A current.
- Boat holder and current display.
- Double layers water-cooled vacuum chamber.
- Turbomolecular pump for high vacuum.
- Backup the rotary pump.
- Smart valve for turbopump with a touchscreen monitor.
- Electro-pneumatic valves.
- Crystal thickness monitor with 1nm resolution and 4 sensor holder.
- Substrate holder with electronic shutter and electronic feedthrough four Magnetron.
- Two-stage backup rotary pump.
- Smart valve for turbopump.Touch screen interface.
- Quartz crystal thickness monitor with 1 nm resolution and 4 sensor holder.