VCS100F is a Vacuum Sputtering and Thermal Coating System and the system has the following technical detail:

  • Two cathode magnetron with 3 degrees of freedom adjustment
  • DC power supply with automatic matching box
  • Thermal evaporation platform with 300 A current
  • Boat holder and current display
  • Double layers water-cooled vacuum chamber
  • Turbomolecular pump for high vacuum
  • Backup the rotary pump
  • Smart valve for turbopump with a touchscreen monitor
  • Electro-pneumatic valves
  • Crystal thickness monitor with 1nm resolution and 4 sensor holder
  • Substrate holder with electronic shutter and electronic feedthrough four magnetron
  • Two-stage backup rotary pump
  • Smart valve for turbopump.Touch screen interface
  • Quartz crystal thickness monitor with 1 nm resolution and 4 sensor holder
  • Customizable

Packaging Sample

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